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The characterization of optical components using the Cary Deep UV spectrophotometer and ‘VW’ specular reflectance accessory

 

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The deep ultraviolet spectroscopic properties of a next-generation photoresist
The deep ultraviolet spectroscopic properties of a next-generation photoresist Application Note Author Abstract Andrew R. Hind PhD and Rina Soebekti The deep UV spectroscopic properties of a next-generation photoresist material have been investigated using a Cary Deep UV spectrophotometer equipped…
Klíčová slova
photoresist, photoresistdeep, deepreflectance, reflectancespecular, specularspectrophotometer, spectrophotometercary, caryabsolute, absolutesra, sralocations, locationsaccessory, accessorymirrors, mirrorsresist, resistwafer, waferspectroscopic, spectroscopicultraviolet
The determination of thin film thickness using reflectance spectroscopy
The determination of thin film thickness using reflectance spectroscopy Application Note Author Abstract Andrew R. Hind PhD* and Lisette Chomette** The reflectance spectrum of a coated polycarbonate sample was used to determine the film thickness of a polymeric coating. Absolute…
Klíčová slova
reflectance, reflectancefilm, filmthin, thinthickness, thicknessfringes, fringessra, sraxxxxen, xxxxenspecular, specularxxxx, xxxxpublication, publicationaccessory, accessoryinterference, interferenceadl, adlabsolute, absoluteprogramming
Low reflectance measurements using the ‘VW’ technique
Low reflectance measurements using the ‘VW’ technique
2011|Agilent Technologies|Technické články
Low reflectance measurements using the ‘VW’ technique Application Note Author Introduction Andrew R. Hind PhD and Caroline Perier Thin film anti-reflection (AR) coatings are designed to greatly reduce the light loss through the utilization of phase changes and the dependence…
Klíčová slova
reflectance, reflectancemirror, mirrorspecular, specularnir, nirknown, knownvis, visbeam, beamaccessory, accessorycorrection, correctionreflection, reflectionflip, flipmirrors, mirrorsmeasurements, measurementsreference, referencespectrum
Evaluation of the Cary Absolute Specular Reflectance Accessory for the Measurement of Optical Constants of Thin Films
Application Note Materials Evaluation of the Cary Absolute Specular Reflectance Accessory for the Measurement of Optical Constants of Thin Films Author Stuart White Physics Department, Sydney University, Sydney, New South Wales Abstract The optical constants of thin absorbing films can…
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reflectance, reflectanceshims, shimsconstants, constantsbeam, beamfilms, filmsoptical, opticalspecular, specularrotation, rotationcary, caryslide, slidemisalignment, misalignmentsra, sraaluminum, aluminumsample, samplewavelength
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