The deep ultraviolet spectroscopic properties of a next-generation photoresist
Aplikace | 2011 | Agilent TechnologiesInstrumentace
UV–VIS Spektrofotometrie
ZaměřeníMateriálová analýza, Polovodiče
VýrobceAgilent Technologies
Klíčová slovaphotoresist, deep, reflectance, specular, spectrophotometer, cary, absolute, sra, locations, accessory, mirrors, resist, wafer, spectroscopic, ultraviolet, polyhydroxystyrene, soebekti, wavelengths, polymethacrylates, lithography, coating, lithographic, spectra, photoresists, glovebox, reflectivity, matched, formidable, movable, wavelength, broadband, next, properties, generation, amplified, massachusetts, light, nitrogen, acquired, conventional, five, electromagnetic, absorb, limit, spherical, plans, portions, instruments, theory, calculates
Podobná PDF
The characterization of optical components using the Cary Deep UV spectrophotometer and ‘VW’ specular reflectance accessory
2011|Agilent Technologies|Aplikace
The characterization of optical components using the Cary Deep UV spectrophotometer and ‘VW’ specular reflectance accessory Application Note Author Andrew R. Hind PhD Abstract Agilent Technologies, Inc. Deep UV spectra of magnesium fluoride coated optical components have been acquired using…
Klíčová slova
reflectance, reflectancespecular, specularcary, carydeep, deepspectrophotometer, spectrophotometerfluoride, fluoridemagnesium, magnesiumoptical, opticalcoated, coatedaccessory, accessorymirrors, mirrorswavelength, wavelengthabsolute, absolutespectra, spectracoating
The determination of thin film thickness using reflectance spectroscopy
2011|Agilent Technologies|Aplikace
The determination of thin film thickness using reflectance spectroscopy Application Note Author Abstract Andrew R. Hind PhD* and Lisette Chomette** The reflectance spectrum of a coated polycarbonate sample was used to determine the film thickness of a polymeric coating. Absolute…
Klíčová slova
reflectance, reflectancefilm, filmthin, thinthickness, thicknessfringes, fringessra, sraxxxxen, xxxxenspecular, specularxxxx, xxxxpublication, publicationaccessory, accessoryinterference, interferenceadl, adlabsolute, absoluteprogramming
Low reflectance measurements using the ‘VW’ technique
2011|Agilent Technologies|Technické články
Low reflectance measurements using the ‘VW’ technique Application Note Author Introduction Andrew R. Hind PhD and Caroline Perier Thin film anti-reflection (AR) coatings are designed to greatly reduce the light loss through the utilization of phase changes and the dependence…
Klíčová slova
reflectance, reflectancemirror, mirrorspecular, specularnir, nirknown, knownvis, visbeam, beamaccessory, accessorycorrection, correctionreflection, reflectionflip, flipmirrors, mirrorsmeasurements, measurementsreference, referencespectrum
Evaluation of the Cary Absolute Specular Reflectance Accessory for the Measurement of Optical Constants of Thin Films
2023|Agilent Technologies|Aplikace
Application Note Materials Evaluation of the Cary Absolute Specular Reflectance Accessory for the Measurement of Optical Constants of Thin Films Author Stuart White Physics Department, Sydney University, Sydney, New South Wales Abstract The optical constants of thin absorbing films can…
Klíčová slova
reflectance, reflectanceshims, shimsconstants, constantsbeam, beamfilms, filmsspecular, specularoptical, opticalrotation, rotationcary, carymisalignment, misalignmentslide, slidesra, srawavelength, wavelengthaluminum, aluminumsample