Direct Analysis of Metallic Impurities in SiC and GaN Wafers by LA-GED-MSAG-ICP-MS/MS
Aplikace
| 2023 | Agilent Technologies
ICP/MS, ICP/MS/MS, Laserová ablace
Instrumentace
ICP/MS, ICP/MS/MS, Laserová ablace
Výrobce
Agilent Technologies
Zaměření
Polovodiče
Automated Surface Analysis of Metal Contaminants in Silicon Wafers by Online VPD-ICP-MS/MS
Aplikace
| 2023 | Agilent Technologies
ICP/MS, ICP/MS/MS
Instrumentace
ICP/MS, ICP/MS/MS
Výrobce
Agilent Technologies
Zaměření
Polovodiče
Characterization of Surface Metal Contamination on Silicon Wafers Using Surface Metal Extraction Inductively Coupled Plasma Mass Spectrometry (SME- ICP-MS)
Aplikace
| 2001 | Agilent Technologies
ICP/MS
Instrumentace
ICP/MS
Výrobce
Agilent Technologies
Zaměření
Polovodiče
Characterization of Trace Impurities in Silicon Wafers by High Sensitivity Reaction Cell ICP-MS
Aplikace
| 2003 | Agilent Technologies
ICP/MS
Instrumentace
ICP/MS
Výrobce
Agilent Technologies
Zaměření
Polovodiče
Automated Analysis of Semiconductor Grade Hydrogen Peroxide and DI Water using ICP-QQQ
Aplikace
| 2018 | Agilent Technologies
ICP/MS, ICP/MS/MS
Instrumentace
ICP/MS, ICP/MS/MS
Výrobce
Agilent Technologies
Zaměření
Polovodiče
Improvement of ICP-MS detectability of phosphorus and titanium in high purity silicon samples using the Agilent 8800 Triple Quadrupole ICP-MS
Aplikace
| 2013 | Agilent Technologies
ICP/MS, ICP/MS/MS
Instrumentace
ICP/MS, ICP/MS/MS
Výrobce
Agilent Technologies
Zaměření
Polovodiče
Direct Measurement of Metallic Impurities in 20% Ammonium Hydroxide by 7700s/7900 ICP-MS
Aplikace
| 2017 | Agilent Technologies
ICP/MS
Instrumentace
ICP/MS
Výrobce
Agilent Technologies
Zaměření
Polovodiče
Direct Analysis of Photoresist and Related Solvents Using the Agilent 7500cs ICP-MS
Aplikace
| 2004 | Agilent Technologies
ICP/MS
Instrumentace
ICP/MS
Výrobce
Agilent Technologies
Zaměření
Polovodiče
Ultrapure Process Chemicals Analysis by ICP-QQQ with Hot Plasma Conditions
Aplikace
| 2021 | Agilent Technologies
ICP/MS, ICP/MS/MS
Instrumentace
ICP/MS, ICP/MS/MS
Výrobce
Agilent Technologies
Zaměření
Polovodiče
Multielement Nanoparticle Analysis of Semiconductor Process Chemicals Using spICP-QQQ